| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide polishing cloth which makes it harder for slurry to enter a belt than before. <P>SOLUTION: The polishing cloth is stuck on a polishing belt 2 having an opening window part for end-point detection; and a light-transmissive film 7 for end-point detection is stuck at a place corresponding to the opening window part 5 of the abrasive belt 2, and a liner 9 is stuck on the transmissive film 7 and also stuck across an adhesive layer on parts other than the place corresponding to the opening window part 5. This polishing cloth 1 has a light- transmissive film 7 for end-point detection stuck on the place corresponding to the opening window part 5 of the polishing belt 2 and the end point of the surface state of a polished body can be detected through the transmissive film 7. <P>COPYRIGHT: (C)2003,JPO |
