| 摘要 |
PROBLEM TO BE SOLVED: To provide an electro-mechanical grating device which can provide the continuous control of diffraction efficiency and has little mechanical failure of ribbon elements. SOLUTION: This electro-mechanical grating device includes: a base having a surface; a bottom conductive layer provided above the base; providing a spacer layer which defines an upper surface and a channel having a first and a second opposing side wall and a bottom and forming the channel in the spacer layer; a plurality of ribbon elements spaced apart, disposed parallel to each other and spanning the channel, wherein the ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel and each of the ribbon elements is provided with a conductive layer; and a mechanical stop provided between the bottom conductive layer and the bottom of the channel, wherein the mechanical stop forms a rigid barrier that is separated from a lower ribbon surface of the ribbon elements by a distance h<SB>0</SB>. COPYRIGHT: (C)2003,JPO
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