发明名称 |
Carrier head with a non-stick membrane |
摘要 |
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base to define a chamber. The flexible membrane has a core of a first material and an outer layer of a second material having a lower adhesion to the substrate than the first material. An exposed surface of the outer layer provides a mounting surface for the substrate.
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申请公布号 |
US2003124963(A1) |
申请公布日期 |
2003.07.03 |
申请号 |
US20010033581 |
申请日期 |
2001.12.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ZUNIGA STEVEN M.;CHEN HUNG CHIH |
分类号 |
B24B1/00;B24B37/04;B24B41/06;(IPC1-7):B24B7/22 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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