METHOD OF MANUFACTURING COLD CATHODE DEVICE, COLD CATHODE DEVICE, AND DISPLAY DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode device improving electron emission efficiency in addition to keeping chemical stability of carbon in electron emission.

SOLUTION: This manufacturing method for the cold cathode device having a cathode bus formed on a substrate and a field emission cold cathode made from a carbon base material electrically connected to the cold cathode bus comprises a process forming the cold cathode bus on the substrate; a process forming the carbon base material layer containing graphite as the main component and electrically connected to the cold cathode bus; and a process introducing impurity atoms or molecules having a work function smaller than that of the graphite into the carbon base material layer and forming the field emission cold cathode.

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