发明名称 HIGH FREQUENCY SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a high frequency semiconductor device which reduces unevenness in the intrinsic impedance of a high frequency transmission path constituted of a grounded electrode and an interconnection provided on a high frequency semiconductor chip. <P>SOLUTION: A covered electrode 8 to be connected to a ground potential is provided on an active region on the surface side of the high frequency semiconductor chip 2. The high frequency transmission path is constituted between an interconnection 3 provided on the reverse of the chip 2 and the covered electrode 8, with the latter serving as a high frequency ground surface. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003163310(A) 申请公布日期 2003.06.06
申请号 JP20010364165 申请日期 2001.11.29
申请人 FUJITSU QUANTUM DEVICES LTD 发明人 SUZUKI YOJI;MINETANI KEIJI
分类号 H01L23/12;H01L21/338;H01L21/60;H01L21/822;H01L23/522;H01L23/66;H01L25/065;H01L27/04;H01L29/778;H01L29/812 主分类号 H01L23/12
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