| 摘要 |
In a method for electronic image rectification in pixel-by-pixel scanning of a substrate (2) by means of a bundled electromagnetic beam, the pixels (7) are read out one after the other in readout intervals (R) of constant predetermined duration. In order to improve image quality, the deviation between a reference scanning movement and an actual scanning movement carried out on the reference substrate (S0) is initially determined in a calibration process, for example, by means of a reference substrate (S0) with a known geometric surface structure. Depending on this deviation, a delay interval Dn(n=0 . . . N) is determined for a pixel (7) and the start of the readout interval (R) of this pixel (7) or of the subsequent pixel is delayed by this delay interval Dn. The information about the delay interval (Dn) is stored. In an analysis process for examining a substrate (2), the stored information about the delay interval (Dn) is accessed for the pixel (7), and the delay interval (Dn) is added before or after the readout interval (R).
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