SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning electron microscope which can insert a sample in a spare room into an observation room without contaminating it by preventing organic gas molecules from flowing back to the spare room and thus can alleviate factors of contamination. SOLUTION: By arranging a gas guiding valve in the vicinity of a spare room and always guiding in very small amount of gas at evacuation, a flow of gas is created from a spare room side to an oil rotation pump side, whereby, backflow of organic gas molecules, a factor of contamination taking place at evacuation of the spare room can be prevented and organic gas molecules adhering to a sample can be curtailed.