| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon film for improving the wear resistance and durability of a tool, die, machine parts or the like instead of a diamond film or a diamondlike film. SOLUTION: The carbon film has a density of 2.8 to 3.3 g/cm<3> . The film preferably has a spin density of 1×10<18> to 1×1021 spins/cm<3> , a carbon concentration of >=99.5 atomic %, a hydrogen concentration of <=0.5 atomic %, a rare gas element concentration of <=0.5 atomic %, and a Knoop hardness of 2,000 to 6,000. The carbon film can be deposited by a cathode arc ion plating method or a laser abrasion method using solid carbon as the raw material in an atmosphere with a vacuum of <=0.05 Pa in which a gas containing hydrogen and rare gas elements is not introduced. The carbon film-coated member coated with the carbon film has excellent wear resistance and durability.
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