INFRARED MICROSCOPE, LASER DEFECT CORRECTING DEVICE WITH LASER USING THE SAME, AND METHOD OF OBSERVING LIQUID CRYSTAL PANEL

摘要

PROBLEM TO BE SOLVED: To provide a microscope and an observing method by which observation can be done without peeling off a polarizing plate with a retardation plate. SOLUTION: An infrared light source 2 for vertical lighting is used as a light source for vertical lighting of the microscope and an infrared high- sensitivity type CCD is used as a CCD for observation. This microscope makes it possible to observe an image of a part through the polarizing plate with the retardation plate that can not be observed through a microscope for visible light.