LASER BEAM MACHINING METHOD AND DEVICE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To perform proper laser-beam machining for securing the stable electric conductivity of a workpiece, e.g. a substrate. SOLUTION: In a method of successively laser-beam machining a workpiece which has a first machining layer and at least a second machining layer that is higher in machining energy than the first layer, the second layer is machined under the first laser condition until its exposed area becomes larger than a prescribed value, and then machined under the second laser condition that is higher in machining energy than the first layer.