METHOD OF MANUFACTURING FINE STRUCTURE, METHOD OF MANUFACTURING ELECTRONIC DEVICE AND APPARATUS FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method by which a fine structure can be obtained. SOLUTION: A member (108) to be treated is exposed and its shape is changed by relatively moving a laser beam or electron beam (101) with respect to the member (108) to be treated and simultaneously and intermittently repeating the irradiation. At this time, a multiplicity of micro-ruggedness or recessed shapes are formed at the member (108) to be treated by using branching means (103) for branching one beam (108) to a plurality of beams (106 and 107), paralleling means (104) for converting a plurality of the beams respectively to beams progressing in parallel, and condenser means (105) for generating a plurality of microspots by condensing a plurality of the beams to the member (108) to be treated.