发明名称 |
Apparatus and method for cleaning a furnace torch |
摘要 |
An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture body and a cleaning bath. The fixture body is formed of cylindrical shape with a top ring, a bottom ring and three support rods connecting the two rings together. The top ring is provided with an outwardly extending flange portion for engaging an opening in a cleaning bath for supporting and suspending the fixture body in the bath. The bottom ring is equipped with a pair of symmetrically positioned, inwardly extending arcuate-shaped flange portions adapted for supporting an edge of a bottom surface of the furnace torch in the cleaning bath.
|
申请公布号 |
US2003084923(A1) |
申请公布日期 |
2003.05.08 |
申请号 |
US20010993238 |
申请日期 |
2001.11.06 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
KAO JUNE-YIE;WU YIE-MIN;YANG MING-HSUN;YANG CHII-SHING |
分类号 |
B08B9/00;B08B11/02;(IPC1-7):B08B9/093 |
主分类号 |
B08B9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|