发明名称 Integrated variable electrical capacitance device and method for producing said device
摘要 The present invention concerns an integrated variable capacitance device comprising at least one membrane (12) forming at least one mobile armature and having at least one principal face facing at least one fixed armature. In accordance with the invention, the membrane has at least one rigidity rib (32) lying in a perpendicular direction to said principal face.
申请公布号 US2003085450(A1) 申请公布日期 2003.05.08
申请号 US20020270064 申请日期 2002.10.15
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DELAPIERRE GILLES
分类号 B81B3/00;H01G5/16;(IPC1-7):H01L21/20;H01L29/82 主分类号 B81B3/00
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