Improved printhead structure and method for producing the same

摘要

A high-durability printhead (200, 300, 400, 500, 600, 700, 800, 900, 1000) for an inkjet printing system. The printhead (200, 300, 400, 500, 600, 700, 800, 900, 1000) includes a substrate (82) having ink ejectors (e.g. resistors) (86) thereon and an orifice plate (104) positioned above the substrate (82). The orifice plate (104) (which preferably involves a non-metallic polymer film) has a top surface (110), bottom surface (112) and a plurality of openings (124) therethrough. To improve the durability of the orifice plate (104), a protective coating (202, 302, 502, 702) is applied to the top surface (110) and/or the bottom surface (112) of the plate (104). Representative coatings (202, 302, 502, 702) involve dielectric compositions (including diamond-like carbon) or at least one layer of metal. This approach improves the abrasion and deformation resistance of the plate (104) and avoids "dimpling" problems. Likewise, an intermediate barrier layer (1002) of diamond-like carbon may be used between the orifice plate (104) and the substrate (82). As result, an additional level of structural integrity is imparted to the orifice plate (104) and printhead (1000).