发明名称 |
Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing |
摘要 |
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
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申请公布号 |
US6555270(B2) |
申请公布日期 |
2003.04.29 |
申请号 |
US20010818465 |
申请日期 |
2001.03.27 |
申请人 |
LOCKHEED MARTIN ENERGY RESEARCH CORPORATION |
发明人 |
BATES JOHN B. |
分类号 |
C01G51/00;H01M4/04;H01M4/131;H01M4/48;H01M4/485;H01M4/52;H01M4/525;(IPC1-7):H01M4/48 |
主分类号 |
C01G51/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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