摘要 |
PROBLEM TO BE SOLVED: To manufacture an ink jet head without generating an unnecessary deflection to a thin bottom wall part of an ink reservoir for supplying ink to each ink pressure chamber communicating with an ink nozzle. SOLUTION: An air relief groove 51 is formed to a surface part of an electrode glass substrate 3 opposed to the bottom wall part 13 of the ink reservoir 7 formed by a silicon single crystal substrate 2 in the ink jet head 1. When the electrode glass substrate 3 is anodically bonded to a rear face of the silicon single crystal substrate 2, bubbles are discharged to the outside from between the substrates via the air relief groove 51. The trouble that a strength for joining substrates decreases and the unnecessary deflection is left at the bottom wall part 13 of the ink reservoir as a result of joining the substrates with bubbles kept remaining between the substrates can be avoided accordingly.
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