| 摘要 |
PROBLEM TO BE SOLVED: To provide an aluminum alloy to be film-formed having strength and corrosion resistance in a high-temperature heat cycle and corrosive atmosphere, and to provide an aluminum alloy material. SOLUTION: The aluminum alloy to be film-formed comprises 4.0-5.0 wt.% Mg, 0.02-0.1 wt.% Cr, impurities of Si, Fe, Cu, Mn, Zn and Ni, of which each content is regulated to 0.1 wt.% or less, and the balance Al with other impurities. The aluminum alloy material superior in corrosion resistance has corrosion resistant films such as an anodized film, a fluorinated film, a composite film formed by Ni-P plating and fluorination, and a composite film formed by anodizing and fluorination, on the surface of the base alloy material with the above composition. The above aluminum alloy and alloy material are suitable for materials used in a CVD apparatus, a PVD apparatus, an LCD manufacturing apparatus, and a semiconductor manufacturing device.
|
