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发明名称
Indretning til elektrostatisk fastholdelse
摘要
申请公布号
DK1138111(T3)
申请公布日期
2003.04.22
申请号
DK19990971977T
申请日期
1999.11.10
申请人
SEMCO ENGINEERING S.A.
发明人
PELLEGRIN, YVON;HERNANDEZ, JOSE;CLAUDE, RICHARD;HALE, WILLIAM
分类号
H01L21/683;H02N13/00;(IPC1-7):H02N13/00;H01L21/68
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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