发明名称 DOSIMETER HAVING CHARGE-MEASURING DEVICE WITH WIDE DYNAMIC RANGE
摘要 <p>A fast dosimeter for ion implantation and other systems that produce charges or current to be measured. When a charge accumulator reaches a predetermined charge, a fixed charge is removed to reduce the accumulated charge. A counter records each charge removal. Between removals, an analog-to-digital converter measures the accumulator charge. The outputs from the counter and the analog-to-digital converter provide a continually updated value for the total accumulated charge, and by differentiation, current with respect to time.</p>
申请公布号 WO2003032007(A2) 申请公布日期 2003.04.17
申请号 US2002031434 申请日期 2002.10.11
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