发明名称 |
CURRENT MULTIPLEX TRANSMISSION OF SEVERAL SENSOR SIGNALS (VEHICLES) |
摘要 |
<p>A plasma CVD apparatus in which microwave power is supplied into a reaction chamber (2) provided inside an annular waveguide (5) through an antenna (20) provided the inner peripheral part of the waveguide (5) so as to produce a plasma inside the reaction chamber (2) and to form a film by a vapor growth synthesizing method. A cooler (27) is disposed between the annular waveguide (5) and the reaction chamber (2) so as to maintain the low temperature of the annular waveguide (5). <IMAGE></p> |
申请公布号 |
KR20030029133(A) |
申请公布日期 |
2003.04.11 |
申请号 |
KR20037002073 |
申请日期 |
2003.02.13 |
申请人 |
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发明人 |
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分类号 |
H05H1/18;B01J19/08;C03B37/018;C23C16/511;H01J37/32;H05B6/70;H05B6/80;H05H1/24;H05H1/46 |
主分类号 |
H05H1/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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