SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device capable of eliminating useless consumption of a treatment liquid in a treatment system for discharging treatment liquid from a liquid outlet to a substrate, while scanning a treatment liquid discharge nozzle having the liquid outlet in which slit-like or a plurality of small holes are juxtaposed. SOLUTION: A collecting container 30 for collecting a developer discharged out of a wafer face from a slit-like liquid outlet 26 of a developer discharge nozzle 24 on the periphery of a developing cup 16 arranged so as to surround a wafer W held on a wafer holding part 10.