发明名称 Methods of making magnetoresistive memory devices
摘要 The invention includes methods of forming magnetoresistive devices. In one method, a construction is formed which includes a first magnetic layer, a non-magnetic layer over the first magnetic layer, and a second magnetic layer over the non-magnetic layer. A first pattern is extended through the second magnetic layer and to the non-magnetic layer with an etch selective for the material of the second magnetic layer relative to the material of the non-magnetic layer. A dielectric material is formed over the patterned second magnetic layer, and subsequently a second etch is utilized to extend a second pattern through the non-magnetic layer and at least partway into the first magnetic layer.
申请公布号 US2003068897(A1) 申请公布日期 2003.04.10
申请号 US20010971758 申请日期 2001.10.04
申请人 YATES DONALD L. 发明人 YATES DONALD L.
分类号 G11B5/127;H01L21/302;H01L21/461;H01L27/22;H01L43/12;(IPC1-7):H01L21/302 主分类号 G11B5/127
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