发明名称 DIAPHRAGM DEVICE, PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE DEVICE, AND MICRO-DEVICE PRODUCING METHOD
摘要 <p>This diaphragm device has a plurality of diaphragm blade bases (32) for adjusting the size of the opening (S). This device has a driving mechanism (33) for reciprocally linearly moving the respective diaphragm blade bases (32) in such a manner that, of the outer contours of the diaphragm blade bases (32), an optional point on the contour disposed on the center side of the opening (S) is directed toward substantially the center of the opening (S). This enables the diaphragm device to stand a high frequency of operation and to have a wide diaphragming range.</p>
申请公布号 WO2003028074(P1) 申请公布日期 2003.04.03
申请号 JP2002009956 申请日期 2002.09.26
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