发明名称 |
Semiconductor device of multi-wiring structure and method of manufacturing the same |
摘要 |
A plurality of wiring layers (11, 12, 13) are laminated on an LSI chip. Each wiring layer includes an electrode (17) to which is applied a mechanical pressure, a first insulating film (16) formed in a region where it is necessary to have a high mechanical strength and having the electrode (17) formed therein, a second insulating film (14) formed in the same layer as the layer of the first insulating film (16) and formed in a region where a mechanical strength higher than that of the first insulating layer (16) is not required, and a wiring layer (15) formed on the surface of the second insulating film (14). <IMAGE> |
申请公布号 |
EP1298725(A2) |
申请公布日期 |
2003.04.02 |
申请号 |
EP20010128356 |
申请日期 |
2001.11.30 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MATSUNAGA, NORIAKI;SHIMOOKA, YOSHIAKI;HIGASHI, KAZUYUKI;SHIBATA, HIDEKI |
分类号 |
H01L23/52;H01L21/31;H01L21/3205;H01L21/822;H01L23/485;H01L23/522;H01L23/532;H01L27/04 |
主分类号 |
H01L23/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|