Electrostatic adsorption device

摘要

An electrostatic adsorption device 1B has a dielectric layer 2, electrodes 4A and 4B, a cooling member 5 and an insulating adhesive 3. The dielectric layer 2 is made of a ceramic dielectric material and has an adsorption face and a back face. The electrodes 4A and 4B are provided on the back face 2b of the dielectric layer 2. The electrodes 4A and 4B define gaps 10. The insulating adhesive 3 is provided between the back face 2b of the dielectric layer 2 and the cooling member 5. The insulating adhesive 3 covers the electrodes 4A and 4B and the back face 2b and is provided in the gap 10.