| 摘要 |
<p>Process, apparatus and application of silicon/silicon alloy/silicon compound (10) comprising at least one silicon atom boat, silicon/silicon alloy/silicon compound (10) comprising at least one silicon atom made epitaxial chamber and various silicon/silicon alloy/silicon compound comprising at least one silicon atom made tubing and liners is described here. Powder pressing (12-16), plasma and non plasma powder deposition, slurry deposition and slurry casting, silicon/silicon alloy casting and directional solidification are among few methods described here. Silicon/silicon alloy (10) made articles and some of their applications in the wafer processing industry is also described.</p> |
