发明名称 Method for bonding IC chips having multi-layered bumps with corrugated surfaces and devices formed
摘要 A method for bonding an IC chip formed with corrugated, multi-layered bumps to conductive elements on a substrate and devices formed by such method are disclosed. In the method, multi-layered bumps are formed by a cover layer of a conductive metal deposited on a base layer of a compliant material. The exposed bonding surface of the bump is formed in a corrugated fashion, or in a serrated shape with saw-tooth configurations. The saw-tooth configurations may either be rectangular or triangular. In the bonding method, instead of using an anisotropic conductive film loaded with conductive particles, a solid adhesive film without conductive particles or a liquid adhesive material without conductive particles can be utilized. The serrated bonding surface of the bumps is effective in expelling the adhesive material from the bonding interface between the bumps and the conductive elements such that a low resistance bond can be formed between an IC chip and a substrate. The solid adhesive layer or the liquid adhesive material, after bonding and curing, functions effectively as a moisture barrier layer.
申请公布号 US6537854(B1) 申请公布日期 2003.03.25
申请号 US19990317307 申请日期 1999.05.24
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHANG SHYH-MING;JOU JWO-HUEI;WU CHI-YUAN
分类号 H01L21/56;H01L21/60;H01L23/485;(IPC1-7):H01L21/44;H01L23/48 主分类号 H01L21/56
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