| 摘要 |
A pressure chamber assembly (400) for processing a substrate (5) includes a pressure vessel defining an enclosed pressure chamber (410). A substrate holder (552) is disposed in the pressure chamber (410) and is adapted to hold the substrate (5). A drive assembly (580) is operable to move the substrate holder (552). The drive assembly (580) includes a first drive member (560, 590) connected to the substrate holder (552) for movement therewith relative to the pressure vessel and a second drive member (592, 594) fluidly isolated from the first drive member and the pressure chamber. A drive unit (582) is operable to move the second drive member (592, 594). The drive unit (582) is fluidly isolated from the first drive member (560, 590) and the pressure chamber (410). The second drive member (592, 594) is non-mechanically coupled to the first drive member (560, 590) such that the drive unit (582) can move the substrate holder (552) via the first and second drive members.
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