发明名称 Ceramic substrate and sintered aluminum nitride
摘要 The present invention provides a sintered aluminum nitride body and a ceramic substrate, which show a volume resistivity of not less than 108 OMEGA.cm even at an elevated temperature of as high as 500° C. The present invention relates to a ceramic substrate comprising a conductive layer disposed internally or on the surface thereof, wherein said ceramic substrate comprises a nitride ceramic and boron is contained in said nitride ceramic, and to a sintered aluminum nitride body containing boron.
申请公布号 US2003054147(A1) 申请公布日期 2003.03.20
申请号 US20020244008 申请日期 2002.09.16
申请人 IBIDEN CO., LTD. 发明人 NIWA TAKEO
分类号 H05B3/10;C04B35/58;C04B35/581;C04B41/51;C04B41/88;H01L21/00;H01L21/324;H01L21/683;H05B3/14;H05B3/26;H05B3/28;H05B3/68;(IPC1-7):B32B18/00 主分类号 H05B3/10
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