| 摘要 |
PURPOSE: A process for selectively adsorbing oxygen difluoride (OF2) from nitrogen trifluoride gas (NF3) by contacting nitrogen trifluoride gas containing oxygen difluoride with aqueous solution of potassium thiosulfate (K2S2O3), potassium sulfide (K2S) or their mixtures is provided. CONSTITUTION: In a process for selectively adsorbing oxygen difluoride (OF2) from nitrogen trifluoride gas (NF3) by contacting nitrogen trifluoride gas containing oxygen difluoride with aqueous solution of potassium thiosulfate (K2S2O3), potassium sulfide (K2S) or their mixtures, the method is characterized in that the concentration of aqueous solution of potassium thiosulfate (K2S2O3), potassium sulfide (K2S) or their mixtures is within 0.1 and 20 %.
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