METHOD AND APPARATUS FOR END-POINT DETECTION,申请号EP20010933117-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR END-POINT DETECTION
摘要
申请公布号	EP1290249(A1)	申请公布日期	2003.03.12
申请号	EP20010933117	申请日期	2001.05.03
申请人	ACM RESEARCH, INC.	发明人	WANG, HUI
分类号	C25F3/22;C25F7/00;H01L21/321;H01L21/768;(IPC1-7):C25F3/30	主分类号	C25F3/22
代理机构		代理人
主权项
地址

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