发明名称 ELECTROSTATIC LIQUID JET RECORDING HEAD, ITS MANUFACTURING METHOD, ELECTROSTATIC LIQUID JET RECORDER, AND ELECTROSTATIC MICROACTUATOR
摘要 PROBLEM TO BE SOLVED: To prevent the trouble that foreign matters clog and the like by increasing the cross section of a communication path for opening a gap to an atmospheric pressure, and opening the interior of the gap to the atmospheric pressure in a short time without increasing the size of an electrostatic liquid jet recording head. SOLUTION: An electrode member of an electrode substrate 20 is separated by an electrode separation groove 24 formed by etching to be a counter electrode 23. Simultaneously when the electrode separation groove 24 is formed, the electrode member of a part where a communication groove 27 is to be formed in a succeeding process is removed beforehand by etching. Thereafter, a recess which becomes the gap 26 is formed to an insulating film 25 formed to the entire electrode substrate, and at the same time, the communication groove 27 to be a communication hole 28 is formed by etching. The cross section can be made larger by an amount of the thickness of the electrode member.
申请公布号 JP2003072070(A) 申请公布日期 2003.03.12
申请号 JP20010267520 申请日期 2001.09.04
申请人 RICOH CO LTD 发明人 NISHIMURA MANABU
分类号 B41J2/045;B41J2/055;B41J2/16;(IPC1-7):B41J2/045 主分类号 B41J2/045
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