| 发明名称 |
DEVICE AND METHOD FOR MANUFACTURING SHEET METAL |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide sheet manufacturing device/method for obtaining plate-like sheet metal and optimizing an obtained sheet metal shape. SOLUTION: The sheet manufacturing device comprises a substrate transfer mechanism 1. The substrate transport mechanism 1 is arranged, so that it can move in a horizontal direction 104 along a horizontal direction moving shaft 8. The horizontal direction moving shaft 8 is arranged, so that it can move along a vertical direction moving shaft 9. The substrate transfer mechanism 1 has a mechanism for making a substrate 2 tilted.</p> |
| 申请公布号 |
JP2003059849(A) |
申请公布日期 |
2003.02.28 |
| 申请号 |
JP20010242202 |
申请日期 |
2001.08.09 |
| 申请人 |
SHARP CORP |
发明人 |
KOMA SHUJI;GOKAKU HIROZUMI;YANO KOZABURO;TANI YOSHIHEI |
| 分类号 |
H01L21/677;H01L21/208;H01L21/68;H01L31/04;(IPC1-7):H01L21/208 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
