| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic motor which can detect turning position of rotor, while controlling increase in the allocation space in the ultrasonic motor for driving the rotor to turn mainly with a plurality of axes. SOLUTION: A stator 4 has first to third piezoelectric elements 11 to 13, which generate vibration in different directions to a contact part 9b and generates vibration in a plurality of directions to a contact part 9a through a combination of vibrations in two directions. A rotor 5 turns about a plurality of axes respectively, based on the vibrations in a plurality of directions generated in the contact part 9b. The rotor 5 includes a position detector 51, which displaces vibration reflected to the stator 4 depending on the turning position. A high-frequency signal is supplied to any of the piezoelectric elements 11 to 13 to generate vibration to the contact part 9b, and the high-frequency signal reflected to the stator 4 from the rotor 5 is detected with any of piezoelectric element 11 to 13 which does not generate vibration to the contact part 9b, in order to detect the turned position of the rotor 5. |
