发明名称 |
SOLID STATE MICROANEMOMETER |
摘要 |
A solid state microanemometer is micromachined from a bonded silicon wafer comprising two silicon layers. The microanemometer comprises a first semiconductor wafer doped with an impurity having an upper planar surface and a lower planar surface with a peripheral edge; and a second semiconductor wafer bonded to the first semiconductor wafer having an upper planar surface; a lower surface; and a cavity having a peripheral edge and a peripheral margin defined on the upper planar surface and bounded by the peripheral edge of the cavity wherein the lower planar surface of the first semiconductor is bonded to the peripheral margin of the cavity so as to at least partially close the cavity wherein .025 to 99% of the peripheral edge of the lower planar surface of the first semiconductor overlaps with the peripheral edge of the cavity.
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申请公布号 |
CA2299252(C) |
申请公布日期 |
2003.02.18 |
申请号 |
CA20002299252 |
申请日期 |
2000.02.23 |
申请人 |
MEMSYS, INCORPORATED |
发明人 |
TSUEI, TIMOTHY W.;GENOVA, PERRY A. |
分类号 |
G01F1/692;B81B1/00;G01F1/684;G01P5/12;(IPC1-7):G01P5/08 |
主分类号 |
G01F1/692 |
代理机构 |
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代理人 |
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地址 |
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