| 摘要 |
PROBLEM TO BE SOLVED: To set image formation performance levels to be not so sensitive to the tolerance of manufacture. SOLUTION: A catadioptric projection lens is constituted, so that a single intermediate real image (3) is formed, while the image of a pattern arranged on an object plane (2) is formed on an image plane (4). A 1st catadioptric part (5), having a concave mirror (6) and a beam-deflection device (7), and a 2nd dioptric part (8) beginning from the beam deflecting device are positioned between the object plane and the image plane. The optical system is constituted, so that the intermediate image follows the 1st lens (17) of the dioptric part (8), and is preferably readily accessible. It is useful to have the intermediate image located in between a pair of lenses (17 and 21) of the dioptric part (8) and exists at a position behind the final reflection surface (10) of the beam- deflection device (7) and being separated far therefrom, in order to eliminate imaging aberrations. |
