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发明名称
Halbleiterbauelement
摘要
申请公布号
DE69713658(T2)
申请公布日期
2003.02.13
申请号
DE19976013658T
申请日期
1997.04.03
申请人
TEXAS INSTRUMENTS INC., DALLAS
发明人
PARANJPE, AJIT P.
分类号
C23C16/52;C23C16/12;C23C16/20;H01L21/205;H01L21/285;(IPC1-7):C23C16/12;H01L21/00
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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