APPARATUS FOR CONTROLLING LENS TEMPERATURE IN SEMICONDUCTOR STEPPER EQUIPMENT

摘要

PURPOSE: An apparatus for controlling lens temperature in semiconductor stepper equipment is provided to improve productivity by maintaining constantly temperature of a lens portion. CONSTITUTION: A teflon pipe having a radius of 1/2 to 1 inch is connected with a nitrogen gas supply source(20). Nitrogen gas is supplied from the nitrogen gas supply source(20) to a regulator(22). A filter(24) is connected with the regulator(22) in order to collect impurities from the nitrogen gas. A gas storage tank(26) is connected with the filter(24) in order to maintain constantly a pressure of the nitrogen gas. A temperature controller(28) is connected with the gas storage tank(26). The nitrogen gas is heated or cooled by the temperature controller(28). The heated or the cooled nitrogen gas is transferred to a lens portion(30).