| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processor of an electronic component formation which keeps a positional relationship between a processing point and a light-converging point of laser beams, even if the position of the processing point of the electronic component formation of a non-circular sectional shape fluctuates, thereby enabling fine groove working. SOLUTION: With this arrangement, an electronic component formation 1 is held by chuck bodies 2, 3 and is rotated in synchronism and is moved horizontally. Further, laser beams 10a which are irradiated from a laser oscillator 10 and condensed by a condenser 4 by way of reflection mirrors 5 to 9 are irradiated on a processing point on a surface of the outer periphery in the electronic component formation 1 from the vertical direction of the rotation axis of the electronic component formation 1. The distance between the processing point and a body base 21 is detected by a displacement sensor 13, and according to the detection signal, the position of the condensed point of the laser beams 10a is followed by changing the condenser 4 by means of driving of a control unit 20 and an actuator 12.</p> |
