发明名称 Thin film transistor device and method of manufacturing the same
摘要 In a case of a liquid crystal display apparatus, a gate insulating film of a TFT driven at a low voltage (3.3 V or 5 V) is constituted by one insulating film, and a thickness thereof is set to, for example, 30 nm. This TFT has a structure in which LDD regions (low concentration impurity regions) are not provided. A TFT having a CMOS structure, which is driven at a high voltage (18 V), has a gate insulating film constituted by two insulating films having a thickness of, for example, 130 nm in total. In an n-type TFT, a low concentration impurity region is provided on a drain side. A p-type TFT has a structure having no LDD region. A pixel TFT has a gate insulating film constituted by two insulating films, and LDD regions provided in both of its source/drain.
申请公布号 US2003025127(A1) 申请公布日期 2003.02.06
申请号 US20020105137 申请日期 2002.03.22
申请人 FUJITSU LIMITED 发明人 YANAI KEN-ICHI;NAGAHIRO YOSHIO;HOTTA KAZUSHIGE;OHGATA KOJI;MISHIMA YASUYOSHI;SASAKI NOBUO
分类号 G02F1/1368;G09F9/00;G09F9/30;G09F9/35;H01L21/336;H01L21/77;H01L21/84;H01L27/08;H01L27/12;H01L29/786;(IPC1-7):H01L29/74 主分类号 G02F1/1368
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