| 发明名称 |
Controlling the thickness of an organic layer in an organic light-emiting device |
| 摘要 |
Apparatus for monitoring and controlling formation of organic layers by physical vapor deposition of organic materials in making organic light-emitting devices is disclosed.
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| 申请公布号 |
US6513451(B2) |
申请公布日期 |
2003.02.04 |
| 申请号 |
US20010839885 |
申请日期 |
2001.04.20 |
| 申请人 |
EASTMAN KODAK COMPANY |
发明人 |
VAN SLYKE STEVEN A.;MARCUS MICHAEL A.;SPOONHOWER JOHN P.;SPAHN ROBERT G.;FREEMAN DENNIS R. |
| 分类号 |
H05B33/10;C23C14/12;C23C14/54;H01L51/50;(IPC1-7):C23C16/448 |
主分类号 |
H05B33/10 |
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