发明名称 |
Manufacture of metal-coating target from single-phase metal alloy involves casting the target or pulverizing intermetallic alloy compound and molding target thermomechanically |
摘要 |
The target (2, 3) is cast, or an intermetallic alloy compound is pulverized and the target is molded thermomechanically.
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申请公布号 |
CH693035(A5) |
申请公布日期 |
2003.01.31 |
申请号 |
CH19970002889 |
申请日期 |
1994.06.24 |
申请人 |
UNAXIS BALZERS AKTIENGESELLSCHAFT |
发明人 |
BRAENDLE HANS;BERGMANN ERICH |
分类号 |
C23C14/08;C23C14/32;C23C14/34;(IPC1-7):C23C14/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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