| 发明名称 |
A METHOD OF DEPOSITING AN INORGANIC FILM ON AN ORGANIC POLYMER |
| 摘要 |
Inorganic materials are deposited onto organic polymers using ALD methods. Ultrathin, conformal coatings of the inorganic materials can be made in this manner. The coated organic polymers can be used as barrier materials, as nanocomposites, as catalyst supports, in semiconductor applications, in coating applications as well as in other applications. |
| 申请公布号 |
CA2452656(A1) |
申请公布日期 |
2003.01.30 |
| 申请号 |
CA20022452656 |
申请日期 |
2002.07.16 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF COLORADO |
发明人 |
GEORGE, STEVEN M.;FERGUSON, JOHN D.;WILSON, CHRISTOPHER A.;WEIMER, ALAN W. |
| 分类号 |
B01J31/06;C08J3/20;C08J5/00;C08J7/04;C08J7/06;C23C16/02;C23C16/14;C23C16/34;C23C16/40;C23C16/44;C23C16/442;C23C16/455;C30B28/12;H01L21/316 |
主分类号 |
B01J31/06 |
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