发明名称 SEMICONDUCTOR STORAGE
摘要 A semiconductor storage having memory cells each composed of a selection MIS transistor (Qt), a write MIS transistor (Qw), and a sense MIS transistor (Qs). The semiconductor storage is of a gain−cell type that amplifies the stored information by means of the sense MIS transistor (Qs). The write MIS transistor (Qw) is a vertical transistor fabricated over the sense MIS transistor (Qs), and a selection MIS transistor (Qt) is fabricated on the side face of the write MIS transistor (Qw) in a self−alignment manner. Consequently, the area of each memory cell is small.
申请公布号 WO03009384(A1) 申请公布日期 2003.01.30
申请号 WO2002JP04459 申请日期 2002.05.08
申请人 HITACHI, LTD.;HITACHI ULSI SYSTEMS CO., LTD.;NAKAZATO, KAZUO;KISU, TERUO;KISU, HARUKO;HASHIMOTO, TAKESHI;ITO, YUTAKA;MURANAKA, MASAYA 发明人 NAKAZATO, KAZUO;HASHIMOTO, TAKESHI;ITO, YUTAKA;MURANAKA, MASAYA;KISU, TERUAKI DI
分类号 H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L21/824 主分类号 H01L21/8242
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