SYNTHETIC QUARTZ GLASS AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing synthetic quartz glass which is good in transmittability in a wavelength region below 165 nm in wavelength and is free of red emitted light occurring in F. SOLUTION: The synthetic quartz glass is manufactured by immersing the synthetic quartz glass in an aqueous solution containing porous silica, Al and F, then heating and clarifying the glass in such a manner that the Al and F contained in the synthetic quartz glass respectively attain >=2 <=9 ppm and >=1 to <100 ppm. The synthetic quartz glass manufactured in the manner described above is suitable for synthetic quartz glass for an F2 laser.