METHOD FOR MANUFACTURING STAMPER FOR OPTICAL RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a stamper for optical recording media by which stampers for optical recording media can be manufactured in a good yield by improving the adhesion of a resist to glass master disks. SOLUTION: In the method for manufacturing a stamper for optical recording media in which a photoresist film formed on a glass master disk by coating is exposed with modulated laser light and developed to form a prescribed rugged pattern and a stamper is manufactured by electroforming, the surface of the glass master disk is subjected two or more times to HMDS coating for carrying out silylation before coating with a resist.