| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a molding die of a diffraction optical element by which release property and durability can be sufficiently obtained. SOLUTION: In the method for manufacturing the molding die of the diffraction optical element, a preform 35 of the molding die of the diffraction optical element is disposed in plasma containing at least carbon atoms. A DC pulse voltage of >=1 kV and <=4 kV is applied on the preform to form a hard carbon film on the molding face of the preform.
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