| 摘要 |
PURPOSE: A structure of a cassette lead of fusion UV bake equipment is provided to prevent an over-abrasion phenomenon due to repeating wafer loading processes by using a ball screw method instead of an existing lead screw method. CONSTITUTION: A cassette platform assembly of fusion UV bake equipment includes a cassette switch panel and a lead screw assembly. The cassette switch panel includes a cassette switch actuator, a guiding screw, and a cassette switch. A ball screw assembly(30) includes a motor(31), a set screw(32), a ball screw(33), an assembly mounting screw(34), and an actuator(35). The actuator(35) has a ball bearing. A process error is not generated by over-abrasion since the actuator(35) is coupled with the ball screw(33) by using the ball bearing(36) through a wafer loading process is performed repeatedly.
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