| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic heater capable of surely contacting a heating element to a feeding terminal, preventing a contact failure due to an oxide or a thermal expansion, and a failure of the heating element, and an electrostatic chuck incorporating the same. SOLUTION: In the ceramic heater of multi-layered structure in which a heating element is embedded in a groove-shaped cavity between two sheets of plate comprised of ceramic sintered compact, upper and lower, and a tip of the feeding terminal is screwed into a through hole formed in the lower plate to contact to the heater element, at least two sheets of metal thin film are interposed between the heating element and feeding terminal. The electrostatic chuck incorporates the ceramic heater.</p> |
