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发明名称
Chemisch verstärkter Resist
摘要
申请公布号
DE59806493(D1)
申请公布日期
2003.01.16
申请号
DE19985006493
申请日期
1998.04.09
申请人
INFINEON TECHNOLOGIES AG
发明人
LEUSCHNER, DR.;GUENTHER, DR.;ELIAN, DR.
分类号
G03F7/004;G03F7/039;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
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